Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381094 | Substrate processing apparatus and substrate processing method | Ryo Kuwajima, Hirofumi Yamaguchi | 2025-08-05 |
| 12283489 | Etching method and etching apparatus | Satoshi TODA, Mitsuhiro Tachibana, Haruna Suzuki, Gen You | 2025-04-22 |
| 12272541 | Etching method and etching apparatus | Gen You, Haruna Suzuki | 2025-04-08 |