Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283489 | Etching method and etching apparatus | Satoshi TODA, Naoki Shindo, Haruna Suzuki, Gen You | 2025-04-22 |
| 12237173 | Substrate processing method, substrate processing apparatus and substrate processing system | Keiko Hada, Akitaka Shimizu, Koichi Nagakura | 2025-02-25 |