Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406851 | High aspect ratio bosch deep etch | Ming Chyi Liu, Shih-Chang Liu | 2025-09-02 |
| 12289979 | Deposition system for high accuracy patterning | Ping-Yin Liu, Chia-Shiung Tsai, Xin-Hua Huang, Yeong-Jyh Lin | 2025-04-29 |