Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427622 | Polishing pad conditioning apparatus | Shih Chung Chen, Sheng-Tai Peng, Hung-Lin Chen | 2025-09-30 |
| 12311498 | Monolithic platen | Tsung-Lung Lai, Shih Chung Chen, Sheng-Tai Peng | 2025-05-27 |
| 12237179 | Fittings for wafer cleaning systems | Ping-Shen Chou, Tsung-Lung Lai, Ching-Wen Cheng, Chun Yan Chen | 2025-02-25 |