Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427622 | Polishing pad conditioning apparatus | Cheng-Ping Chen, Shih Chung Chen, Hung-Lin Chen | 2025-09-30 |
| 12412725 | Adjustable support for arc chamber of ion source | Po-Tang Tseng, Ching-Heng Yen, Tai-Kun Kao | 2025-09-09 |
| 12311498 | Monolithic platen | Tsung-Lung Lai, Cheng-Ping Chen, Shih Chung Chen | 2025-05-27 |