Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412734 | Baffle plate for controlling wafer uniformity and methods for making the same | Jr-Sheng Chen, An-Chi Li, Shih-Che Huang, Chih-Hsien Hsu, Zhi-Hao Huang +2 more | 2025-09-09 |
| 12237179 | Fittings for wafer cleaning systems | Cheng-Ping Chen, Ping-Shen Chou, Tsung-Lung Lai, Ching-Wen Cheng | 2025-02-25 |
| 12202094 | System and method for chemical mechanical polishing pad replacement | Shih Chung Chen, Wei-Kang Tu, Ching-Wen Cheng | 2025-01-21 |