Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400840 | Substrate processing apparatus, substrate holder, and method of manufacturing semiconductor device | Tsuyoshi Takeda | 2025-08-26 |
| 12385139 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takashi Yahata, Kenji Shinozaki, Kazuhiko Yamazaki | 2025-08-12 |
| 12332258 | Dispensing device and method | Toshiki Yamagata, Masashi Shibahara | 2025-06-17 |