Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385139 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Daisuke Hara, Takashi Yahata, Kenji Shinozaki | 2025-08-12 |