Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400840 | Substrate processing apparatus, substrate holder, and method of manufacturing semiconductor device | Daisuke Hara | 2025-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400840 | Substrate processing apparatus, substrate holder, and method of manufacturing semiconductor device | Daisuke Hara | 2025-08-26 |