Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313979 | Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomask | Sanguk Park, Yongwoo Kim, Jongju Park, Jongkeun OH | 2025-05-27 |
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Patents 2025