Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313979 | Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomask | Sanguk Park, Yongwoo Kim, Jongju Park, Youngchang SEO | 2025-05-27 |
| 12259647 | Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask | Sanguk Park, Gyeongcheon Jo, Jongju Park | 2025-03-25 |