Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313979 | Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomask | Sanguk Park, Yongwoo Kim, Youngchang SEO, Jongkeun OH | 2025-05-27 |
| 12259647 | Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask | Jongkeun OH, Sanguk Park, Gyeongcheon Jo | 2025-03-25 |