Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431340 | Exhaust gas processing apparatus having plasma source and substrate processing apparatus including the same | Jaehyun Kim, Kookjin Ann, Taijong Sung, Sunwoo Yook, Young Heo | 2025-09-30 |
| 12409404 | Scrubber system and wet cleaning method using the same | Young Seok Roh, Heesub Kim, Hee Ock Park, Jongyong Bae, Sung Chul Yoon +3 more | 2025-09-09 |
| 12390763 | Apparatus trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus | Uihyoung Lee, Hongsik Park, Taeheon Lee | 2025-08-19 |