Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431340 | Exhaust gas processing apparatus having plasma source and substrate processing apparatus including the same | Jaehyun Kim, Suji Gim, Taijong Sung, Sunwoo Yook, Young Heo | 2025-09-30 |