Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12390763 | Apparatus trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus | Uihyoung Lee, Suji Gim, Hongsik Park | 2025-08-19 |