Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420316 | Substrate processing apparatus and substrate processing method | Jihwan Park, Kuntack Lee | 2025-09-23 |
| 12422754 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Kuntack Lee | 2025-09-23 |
| 12308255 | Apparatus and method for drying substrate | Jihoon Jeong, Younghoo Kim, Kuntack Lee | 2025-05-20 |
| 12287147 | Wafer processing equipment and method of manufacturing semiconductor device | Youngtae Kim, Jihoon Jeong, Younghoo Kim | 2025-04-29 |
| 12278133 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Kuntack Lee, Jihwan Park, Seungmin Shin | 2025-04-15 |
| 12216408 | Apparatus for drying wafer and method for drying wafer | Jihoon Jeong, Younghoo Kim, Kuntack Lee | 2025-02-04 |
| 12211716 | Substrate processing apparatus and substrate processing method | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Jihoon Jeong, Seohyun Kim +2 more | 2025-01-28 |
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Anton Koriakin, Keonyoung Kim, Sukhoon Kim, Seohyun Kim +3 more | 2025-01-14 |