Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420316 | Substrate processing apparatus and substrate processing method | Sangjine Park, Kuntack Lee | 2025-09-23 |
| 12278133 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Sangjine Park, Kuntack Lee, Seungmin Shin | 2025-04-15 |