Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420316 | Substrate processing apparatus and substrate processing method | Sangjine Park, Jihwan Park | 2025-09-23 |
| 12422754 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Sangjine Park | 2025-09-23 |
| 12308255 | Apparatus and method for drying substrate | Sangjine Park, Jihoon Jeong, Younghoo Kim | 2025-05-20 |
| 12278133 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Sangjine Park, Jihwan Park, Seungmin Shin | 2025-04-15 |
| 12225634 | Substrate heating apparatus and method for processing a substrate | Taehong Kim, Younghoo Kim, Sunghyun Park | 2025-02-11 |
| 12216408 | Apparatus for drying wafer and method for drying wafer | Sangjine Park, Jihoon Jeong, Younghoo Kim | 2025-02-04 |
| 12211716 | Substrate processing apparatus and substrate processing method | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Jihoon Jeong, Seohyun Kim +2 more | 2025-01-28 |
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Anton Koriakin, Sangjine Park, Keonyoung Kim, Sukhoon Kim +3 more | 2025-01-14 |