Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379654 | Pellicle for extreme ultraviolet lithography | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Ki Hun Seong | 2025-08-05 |
| 12326658 | Pellicle for extreme ultraviolet lithography containing molybdenum carbide | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Yong Kyung Kim | 2025-06-10 |
| 12321092 | Pellicle for extreme ultraviolet lithography containing amorphous carbon and method for manufacturing the same | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Hye Young Kim | 2025-06-03 |
| 12287568 | Low-temperature direct growth method of multilayer graphene, pellicle for extreme ultraviolet lithography using the same, and method for manufacturing the pellicle | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Hye Young Kim | 2025-04-29 |
| 12282250 | Pellicle for extreme ultraviolet lithography based on yttrium | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Ki Hun Seong | 2025-04-22 |