Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379654 | Pellicle for extreme ultraviolet lithography | Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho, Ki Hun Seong | 2025-08-05 |
| 12326658 | Pellicle for extreme ultraviolet lithography containing molybdenum carbide | Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho, Yong Kyung Kim | 2025-06-10 |
| 12321092 | Pellicle for extreme ultraviolet lithography containing amorphous carbon and method for manufacturing the same | Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho, Hye Young Kim | 2025-06-03 |
| 12287568 | Low-temperature direct growth method of multilayer graphene, pellicle for extreme ultraviolet lithography using the same, and method for manufacturing the pellicle | Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho, Hye Young Kim | 2025-04-29 |
| 12282250 | Pellicle for extreme ultraviolet lithography based on yttrium | Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho, Ki Hun Seong | 2025-04-22 |
| 12248243 | Multilayer graphene direct growth method and method for manufacturing pellicle for extreme ultraviolet lithography using the same | Seul Gi Kim, Hyun Mi Kim, Hye Young Kim | 2025-03-11 |