Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379654 | Pellicle for extreme ultraviolet lithography | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho | 2025-08-05 |
| 12282250 | Pellicle for extreme ultraviolet lithography based on yttrium | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho | 2025-04-22 |