Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428730 | Apparatus for treating substrate | Ki Sang EUM, Woo-Ram Lee, Jong Wha KANG | 2025-09-30 |
| 12331399 | Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid | Ju Won Kim, Yang Yeol Ryu, Hee Man AHN, Jun Ho Seo, Sang Pil Yoon | 2025-06-17 |
| 12198893 | Plasma process monitoring apparatus using terahertz waves and monitoring method thereof | Hak-Sung Kim, Heon Su Kim, Sang-II Kim | 2025-01-14 |