Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12331399 | Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid | Yang Yeol Ryu, Hee Man AHN, Jun Ho Seo, Dong Woon PARK, Sang Pil Yoon | 2025-06-17 |