Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198893 | Plasma process monitoring apparatus using terahertz waves and monitoring method thereof | Hak-Sung Kim, Dong Woon PARK, Sang-II Kim | 2025-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198893 | Plasma process monitoring apparatus using terahertz waves and monitoring method thereof | Hak-Sung Kim, Dong Woon PARK, Sang-II Kim | 2025-01-14 |