Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308221 | Substrate processing system and method for installing edge ring | Takashi Aramaki, Lifu LI, Nobutaka SASAKI, Toshiki AKAMA, Shusei KATO +2 more | 2025-05-20 |
| 12261024 | Plasma processing apparatus and cleaning method | — | 2025-03-25 |