Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341037 | Temperature control apparatus for semiconductor processing equipment, and temperature control method for the same | Kui Zhao, Hiroshi Iizuka, Dee H. Wu, Rason Zuo | 2025-06-24 |
| 12309891 | Control method for multi-zone active-matrix temperature control in plasma processing apparatus | Rason Zuo, Dee H. Wu, Sha Rin | 2025-05-20 |
| 12261012 | Plasma treatment apparatus, lower electrode assembly and forming method thereof | Sheng Guo, Xiang Sun, Guangwei Fan, Kuan-Yu Yang, Hongqing V. Wang +2 more | 2025-03-25 |