Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341037 | Temperature control apparatus for semiconductor processing equipment, and temperature control method for the same | Kui Zhao, Hiroshi Iizuka, Dee H. Wu, Tuqiang Ni | 2025-06-24 |
| 12309891 | Control method for multi-zone active-matrix temperature control in plasma processing apparatus | Tuqiang Ni, Dee H. Wu, Sha Rin | 2025-05-20 |