Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12309891 | Control method for multi-zone active-matrix temperature control in plasma processing apparatus | Tuqiang Ni, Rason Zuo, Dee H. Wu | 2025-05-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12309891 | Control method for multi-zone active-matrix temperature control in plasma processing apparatus | Tuqiang Ni, Rason Zuo, Dee H. Wu | 2025-05-20 |