Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12331402 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more | 2025-06-17 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2025-02-18 |
| 12230495 | Method of depositing silicon nitride films | James S. Sims, Shane Tang, Vikrant Rai, Andrew John McKerrow | 2025-02-18 |