Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344935 | Substrate processing apparatus, heat insulator assembly and method of manufacturing semiconductor device | Akihiro Sato, Kenta KASAMATSU | 2025-07-01 |
| 12241159 | Substrate processing apparatus and ceiling heater | Tetsuya Kosugi, Hitoshi Murata | 2025-03-04 |