Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344935 | Substrate processing apparatus, heat insulator assembly and method of manufacturing semiconductor device | Shuhei Saido, Kenta KASAMATSU | 2025-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344935 | Substrate processing apparatus, heat insulator assembly and method of manufacturing semiconductor device | Shuhei Saido, Kenta KASAMATSU | 2025-07-01 |