Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293930 | Substrate processing apparatus, method of manufacturing semiconductor device and heater | Shinobu Sugiura, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita, Tomoyuki Yamada | 2025-05-06 |
| 12241159 | Substrate processing apparatus and ceiling heater | Tetsuya Kosugi, Shuhei Saido | 2025-03-04 |