Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293930 | Substrate processing apparatus, method of manufacturing semiconductor device and heater | Shinobu Sugiura, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata, Tomoyuki Yamada | 2025-05-06 |