Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339241 | Multiple secondary electron beam alignment method, multiple secondary electron beam alignment apparatus, and electron beam inspection apparatus | Atsushi Ando | 2025-06-24 |
| 12288666 | Multiple electron beam image acquisition method, multiple electron beam image acquisition apparatus, and multiple electron beam inspection apparatus | Chosaku Noda | 2025-04-29 |