Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346035 | Process tool for dry removal of photoresist | Dries Dictus | 2025-07-01 |
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2025-04-15 |
| 12211691 | Dry development of resists | Boris Volosskiy, Samantha Tan, Chenghao Wu, Kevin Li Gu | 2025-01-28 |