Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Eli Mor +2 more | 2025-04-01 |
| 12249525 | Using spectroscopic measurements for substrate temperature monitoring | Ian McDonald, Chengqing Wang, Shifang Li, Xinyuan Chong | 2025-03-11 |