Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400892 | High throughput polishing modules and modular polishing systems | Edward Golubovsky, Jay Gurusamy, Steven M. Zuniga | 2025-08-26 |
| 12394651 | High throughput polishing modules and modular polishing systems | Edward Golubovsky, Jay Gurusamy, Steven M. Zuniga | 2025-08-19 |
| 12198944 | Substrate handling in a modular polishing system with single substrate cleaning chambers | Brian J. Brown, Ekaterina A. Mikhaylichenko, Jin Ji, Steven M. Zuniga | 2025-01-14 |