Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198944 | Substrate handling in a modular polishing system with single substrate cleaning chambers | Brian J. Brown, Ekaterina A. Mikhaylichenko, Jagan Rangarajan, Steven M. Zuniga | 2025-01-14 |