Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405526 | Extreme ultraviolet lithography patterning with assist features | Leonard P. GULER, Tahir Ghani, Charles H. Wallace, Dario Farias, Tsuan-Chung CHANG +5 more | 2025-09-02 |
| 12278204 | Pattern decomposition lithography techniques | Charles H. Wallace, Elliot N. Tan, Swaminathan Sivakumar, Oleg Golonzka, Robert M. Bigwood | 2025-04-15 |