Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403561 | Eddy current monitoring to detect vibration in polishing | Kun Xu, Patrick A. Higashi, Hassan G. Iravani, Haosheng Wu, Eric T. Wu +4 more | 2025-09-02 |
| 12370646 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Denis Ivanov, Jun Qian | 2025-07-29 |