Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12194591 | Roller for location-specific wafer polishing | Fred C. Redeker, Brian J. Brown, Chirantha Rodrigo, Steven M. Zuniga, Jay Gurusamy | 2025-01-14 |
| 12198944 | Substrate handling in a modular polishing system with single substrate cleaning chambers | Brian J. Brown, Jin Ji, Jagan Rangarajan, Steven M. Zuniga | 2025-01-14 |