Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12352371 | Fluid control device and method for fluid control in an extreme ultraviolet light source | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Theodorus Wilhelmus Driessen | 2025-07-08 |
| 12324084 | Apparatus for and method of controlling droplet generator performance | Pooriya Beyhaghi | 2025-06-03 |
| 12273986 | Target delivery system | Georgiy O. Vaschenko | 2025-04-08 |