Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12352371 | Fluid control device and method for fluid control in an extreme ultraviolet light source | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Bob Rollinger | 2025-07-08 |
| 12295088 | Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Herman Harry Borggreve, Brandon Michael Johnson, Vikas Giridhar Telkar | 2025-05-06 |
| 12232244 | Target supply control apparatus and method in an extreme ultraviolet light source | — | 2025-02-18 |
| 12222050 | Robust fluid coupling apparatus | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Vikas Giridhar Telkar, Alexander I. Ershov, Serkan Kincal | 2025-02-11 |