Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12295088 | Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems | Benjamin Andrew Sams, Dietmar Uwe Herbert Trees, Theodorus Wilhelmus Driessen, Brandon Michael Johnson, Vikas Giridhar Telkar | 2025-05-06 |