Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12352371 | Fluid control device and method for fluid control in an extreme ultraviolet light source | Benjamin Andrew Sams, Theodorus Wilhelmus Driessen, Bob Rollinger | 2025-07-08 |
| 12295088 | Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems | Benjamin Andrew Sams, Theodorus Wilhelmus Driessen, Herman Harry Borggreve, Brandon Michael Johnson, Vikas Giridhar Telkar | 2025-05-06 |
| 12222050 | Robust fluid coupling apparatus | Benjamin Andrew Sams, Vikas Giridhar Telkar, Alexander I. Ershov, Theodorus Wilhelmus Driessen, Serkan Kincal | 2025-02-11 |