Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387940 | Dry etching method | Shoi SUZUKI | 2025-08-12 |
| 12371618 | Dry etching method, method for producing semiconductor device, and dry etching gas composition | Ryosuke Sawamura, Shoi SUZUKI, Hiroyuki Oomori | 2025-07-29 |
| 12308244 | Dry etching method, method for producing semiconductor device, and etching device | Kunihiro Yamauchi, Hikaru KITAYAMA | 2025-05-20 |