Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417922 | Surface treatment method, dry etching method, cleaning method, semiconductor device manufacturing method, and etching device | Kunihiro Yamauchi, Akiou Kikuchi | 2025-09-16 |
| 12308244 | Dry etching method, method for producing semiconductor device, and etching device | Kunihiro Yamauchi, Akifumi Yao | 2025-05-20 |