Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387940 | Dry etching method | Akifumi Yao | 2025-08-12 |
| 12371618 | Dry etching method, method for producing semiconductor device, and dry etching gas composition | Ryosuke Sawamura, Hiroyuki Oomori, Akifumi Yao | 2025-07-29 |