Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293896 | Particle beam system | Dirk Zeidler, Hans Fritz, Ingo Mueller, Stefan Schubert, Arne Thoma | 2025-05-06 |
| 12249478 | Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system | Hans Fritz, Dirk Zeidler, Arne Thoma, Joerg Jacobi | 2025-03-11 |