Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340973 | Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product | Stefan Schubert, Dieter Schumacher, Erik Essers, Ingo Mueller, Arne Thoma +2 more | 2025-06-24 |
| 12300462 | System comprising a multi-beam particle microscope and method for operating the same | Nico Kaemmer, Christian Crueger | 2025-05-13 |
| 12293896 | Particle beam system | Hans Fritz, Ingo Mueller, Stefan Schubert, Arne Thoma, Andras G. Major | 2025-05-06 |
| 12283457 | Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt | Nicole Rauwolf, Nico Kaemmer, Michael Behnke, Ingo Mueller, Arne Thoma +2 more | 2025-04-22 |
| 12272519 | Method for area-wise inspecting a sample via a multi-beam particle microscope, computer program product and multi-beam particle microscope for semiconductor sample inspection, and its use | Daniel Boecker | 2025-04-08 |
| 12255040 | Multi-beam particle beam system and method for operating same | Christof Riedesel, Arne Thoma, Georgo Metalidis, Joerg Jacobi, Stefan Schubert +4 more | 2025-03-18 |
| 12249478 | Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system | Hans Fritz, Andras G. Major, Arne Thoma, Joerg Jacobi | 2025-03-11 |